Metrology & Inspection > Hitachi S-8820 CD-SEM
Manufacturer:Hitachi
Condition:Used,we sell it at AS IS(Refurbished and Installation are optional)
Price:Best Offer
Amount: 6 sets (SN 8361-05;SN 8344-06;SN 8358-04;SN 8347-01;SN 8344-05;SN 8343-06)
Currently Configured for 200mm Wafer Sizes
MFG Date: Sep 1997
Install Type: Stand-Alone
Mini-Environment
Cassette Interface (Loader Unit):
(2) Asyst Integrated SMIF
MECS Robot/Cntrl
Lybold Turbo /Cntrl
Stage & Inspection Unit
X, Y Travel Range: 0 ?C 200mm
Control Unit
System Software:
HOST: : v9.25
SEM: 09.27L
IPS: 09.20
HV: 03.00
Stage: 02.13
Evac: 01.06
WT: 1.01
Support Option(s):
Save to DOS FD
Defect Inspection
SECS
Multi-point measurement
Edge Roughness
Hole measurement
Reduced Scan
Defect Type ?C KLA
Image database
Ip Read
SMIF
HV Unit:
TIP SN: H-13223
TIP adjustment: 1700k = 2.30A
HV Timer: 4370 /hr
IF Setting: 2.20A
Running Hours: 3047.1
MO Drive: 1.3GB
Thermal Printer
SECS / GEM Interface
Power Unit
Isolation Transformer
Vacuum Isolation Block & Hoses
Power Requirements: 100VAC, 1 Phase, 50A, 50/60 Hz
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