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Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5

Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher

Manufacturer:Lam Research
Condition:Refurbished to OEM SPEC(Installation and warranty are optional)
Price:Contact Us Now
Location:California,USA
Amount: 4 sets
Description for reference only(One of the unit).
Wafer Size Capacity:4 to 6 inch
The system includes the following.
1. Send Indexer
2. Receive Indexer
3. Entrance Lifter
4. Exit Lifter
5. 4 Pin Lifter
6. Gap Assembly
7. Lower Match Assembly
8. Upper Electrode Assembly
9. Lower Electrode Assembly
10. 5 MFC Gas Box
11. Main Power Supply
12. Main Chamber Generator
13. 2 Recipe Modules, 2 Master Modules
14. Front & Rear EMO Switches
15. Panels & Plexi Glass Covers (Standalone System)
16. Main Chamber, Hex Plate, Orifice Ring, Pump Ring
17. 2 Channel Endpoint Detector
Please also refer to Lam Research 4520 Rainbow Oxide Etcher; Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher.

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